Micromirror

 

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Micromirror

MEMS Mcromirror

This is an SEM photograph of a MEMS microscopic mirror. The mirror element is the circular region in the center of the micrograph. The mirror is surrounded by three banks of electrostatic actuators. When a voltage is applied to one actuator, it moves, and that motion is translated to a vertical motion by a lift mechanism. The lift mechanism is connected to the mirror, and that edge of the mirror is lifted. Because there are three actuators, and three lift mechanisms, the position of the mirror can be controlled at three different points. This results in an ability to point the mirror in any direction desired. By pointing the mirror, it can be used to redirect optical systems. Arrays of mirrors like this one have been used to create telecommunication equipment with an unprecedented ability to switch data. Devices like this are used to create optical cross-connects, and all optical digital networks.

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