|
Electrostatic Actuator
This is an
SEM photograph of a
MEMS
electrostatic actuator. It has an array of interdigitated posts. When a
voltage is applied to the devise, an electrostatic field is produced
which causes the large array of posts to move by a few microns. This
small motion is amplified by the displacement amplifier seen in the
center of the picture. A displacement amplifier translates the large
force, small motion of the actuator to a smaller force, larger
displacement motion of the output of the device. This particular device
is connected to a mechanical elevator, which translates the horizontal
motion of the actuator to a vertical motion of the lift mechanism. These
complex microstructures are used to point microscopic mirrors. This
creates microsystems capable of accurately redirecting light and optical
systems. They can be used to create a new generation of
telecommunication systems capable of radical improvements in the ability
to route data in telecommunication systems. |